圆光栅测角传感器在线自校准系统研制与实验

为了解决测角系统在实际应用中的在线校准问题，设计了一种圆光栅测角传感器在线自校准系统。基于圆封闭原则和傅里叶级数的性质，建立了测量值与单读数头误差之间的关系，实现单读数头自校准。该自校准系统由读数头、玻璃圆光栅、单轴转台和多通道采集控制系统组成。实验结果表明，测角传感器自校准系统的单读数头测量精度为5.90，接近于借助外部参考标准的谐波补偿方法后的精度，系统测量重复性小于0.76。自校准测量系统可实现圆光栅测角传感器在线校准的同时，满足了精密测量领域对精度和可靠性的要求。

Development and experiment of online self-calibration system for circular grating angle sensor

In order to solve the online calibration problem of the angle measuring system in practical application, an online self-calibration system of circular grating angle sensor was designed. Based on the principle of round closure and Fourier series, the relationship between the measured value and the error of single reading head was established, and the single reading head self-calibration was realized. The self-calibration system consisted of a reading head, a glass circle grating, a single-axis turntable and a multi-channel acquisition control system. The experimental result shows that the accuracy of the single reading head of the self-calibration system is 5.90, which is close to the accuracy of the harmonic compensation method with external reference standard, the measuring repeatability is less than 0.76. Self-calibrated measurement system could realize the online calibration of circular grating angle measuring system, which meets the requirement of precision and reliability in precision measurement field.