硅基中长波红外减反微结构研究 |
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引用本文: | 吴启花,熊敏,黄勇,张宝顺,白煜.硅基中长波红外减反微结构研究[J].红外与激光工程,2017,46(4):404001-0404001(7). |
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作者姓名: | 吴启花 熊敏 黄勇 张宝顺 白煜 |
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作者单位: | 1.中国科学院苏州纳米技术与纳米仿生研究所,江苏 苏州 215123; |
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基金项目: | 中科院百人计划(Y6BEQ11001) |
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摘 要: | 采用微加工工艺在Si衬底上制备了微柱和微锥阵列,结合光学建模分析,研究了结构参数对中长波(2.5~9 m)红外光反射率的影响规律。使用严格耦合波分析方法(RCWA)计算的微结构反射光衍射效率与傅里叶红外变换光谱仪(FTIR)测试的反射率结果吻合较好。研究结果表明,Si基微结构对TM及TE偏振光均有良好的红外光减反特性,微锥结构具有更好的减反效果,2.5~6.5 m中红外偏振光的反射率低至2%,同时表现出良好的宽谱与广角度减反特性。
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关 键 词: | Si基微结构 RCWA 中长波红外 偏振 |
收稿时间: | 2016-08-05 |
Antireflective silicon based microstructures for the mid-and long-wavelength infrared |
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Affiliation: | 1.Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China;2.State Key Laboratory for Mechanical Behavior of Materials,Xi'an Jiaotong University,Xi'an 710049,China |
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Abstract: | Si based micro-pillar arrays and micro-cone arrays were fabricated using micro processing technology, the reflection performance of the micro structures was studied in the long wave infrared wavelengths (2.5-9 m) reflection performance of different polarized light. Micro-fabrication combined with modeling analysis of silicon based micro-pillar and micro-cone arrays have been performed to study the effects of structural parameters on the reflectivity of infrared light from 2.5-9 m. Simulation results using rigorous coupled wave analysis (RCWA) method is in line with the test results from a Fourier transform infrared spectrometer (FTIR). It is found that the antireflection characteristics can be obtained for both transverse electric(TE) and transverse magnetic(TM) polarizations, and the micro-cone arrays have lower reflectivity than the micro-pillar arrays. Moreover, the optimized micro-cone arrays show a reflectivity of only 2% or lower from 2.5-6.5 m under TM polarization, with wide-spectrum and omnidirectional antireflection characteristics. |
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