多维栅格标准样板的制备与表征

栅格标准样板作为微纳米几何量量值溯源体系中的重要组成部分，是纳米科技发展的基础保障。为了实现微纳米尺寸栅格结构有效区域的快速循迹与校准，文中设计了一种便于快速定位有效区域并栅格结构正交扫描方向的循迹结构。为了实现不同精度、尺寸范围的校准需求，在同一基板上实现了多维、多参数的横向栅格标准样板的结构设计与集成。使用计量型纳米测量机（NMM）对微纳米栅格标准样板测量误差进行了分析与评价，以实现标准样板的溯源性表征。实验结果表明，栅格标准样板具有良好的均匀性、准确性以及稳定性，验证了研制的栅格标准样板能作为一种理想的实物标准运用于纳米几何量量值溯源体系。

Development and characterization of multi-dimension grid standard template

As an important part of traceability chain for micro-nano geometric quantity, the grid standard template is the basic guarantee for the development of nano-technology. In order to achieve the rapid tracking and calibration of the effective area in the micro-nano grid structure, a tracking structure was designed to quickly locate the effective measurement area and orthogonally scanning direction. In order to meet the calibration requirements of different accuracy and size range, the grid standard template with multi-dimension and multi-parameter structure was designed and integrated in the same substrate. The measurement result error was analyzed and evaluated by the metrological nano measuring machine (NMM), which could characterize the traceability of grid standard template. The experimental results show that the grid standard template has good uniformity, accuracy and stability, and it is verified that the developed grid standard template can be used as an ideal reference standard for nano geometry traceability system.