| 一种双轴电容式微机械加速度计 |
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| 引用本文： | 任杰 樊尚春. 一种双轴电容式微机械加速度计[J]. 传感技术学报, 2006, 19(5): 2174-2176 |
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| 作者姓名： | 任杰 樊尚春 |
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| 作者单位： | 北京航空航天大学仪器学院,北京,100083 |
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| 摘 要： | 提出一种双轴电容式微机械加速度计的结构形式.采用一个质量块敏感两个正交方向的加速度,设计的弹性支撑结构巧妙地实现了正交方向的解耦,且结构稳定性好,以梳齿电容实现差动的静电驱动、电容检测.利用MATLAB软件对敏感结构参数、性能参数进行了计算、分析,用ANSYS仿真软件对敏感结构进行了静态和模态分析,从理论上验证了所提出的双轴电容式微机械加速度计整体结构的可行性.
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| 关 键 词： | 微机电系统 微机械加速度计 有限元分析 |
| 文章编号： | 1004-1699(2006)05-2174-03 |
| 修稿时间： | 2006-07-01 |
A dual-axis capacitive micromechanical accelerometer |
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| Ren Jie,Fan Shangchun. A dual-axis capacitive micromechanical accelerometer[J]. Journal of Transduction Technology, 2006, 19(5): 2174-2176 |
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| Authors: | Ren Jie Fan Shangchun |
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| Abstract: | A structure of dual-axis capacitive micromechanical accelerometer is introduced. A proof mass is sensitive to two orthogonal accelerations. The elasticity strutting structure designed makes cleverly the decoupling of two orthogonal accelerations, and has high structure stability. It uses comb capacitances to realize static electricity driving and capacitance sense. The sensitive structure parameters and capability parameters were calculated and analyzed by MATLAB. The modality and static analysis were used to the sensitive structure by ANSYS. The results show that the structure can fulfill the design demands in theory. |
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| Keywords: | MEMS (micro-electro-mechanical systems) micro-mechanical capacitive accelerometer FEA(finite element analysis) |
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