| 角度测量型原子间力显微镜 |
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| 引用本文： | 刘庆纲,叶声华,清野慧,岗彻.角度测量型原子间力显微镜[J].计量学报,1999,20(3):161-165. |
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| 作者姓名： | 刘庆纲 叶声华 清野慧 岗彻 |
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| 作者单位： | 1. 天津大学,中国天津
2. 东北大学,日本仙台 |
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| 摘 要： | 本作采用光学式角度传感器，制作了探针驱动式角度测量型原子间力显微镜（ＡＦＭ），它区别于历来的原子力显微镜信号的位移测量方法，克服了以往测量方法对被测的尺寸、重量衣扫描速度的限制。
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| 关 键 词： | 角度测量型 位移测量型 原子间力显微镜 |
Angle Detection Type Atomic Force Microscope |
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| Liu Qinggang,Ye Shenhua,Satoshi Kiyono,Tohru Oka.Angle Detection Type Atomic Force Microscope[J].Acta Metrologica Sinica,1999,20(3):161-165. |
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| Authors: | Liu Qinggang Ye Shenhua Satoshi Kiyono Tohru Oka |
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| Abstract: | In this paper, a new type atomic force microscopy (AFM) based on angle measurement with optical angle sensor is introduced. It detects the angular displacement of the microcantilever by driving it to follow the shape of the specimen. This method is different from the traditional methods that detect the displacement of the microcantilever. This method overcomes some limitations of scanning speed and the size and weight of specimen. |
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| Keywords: | Angle detection type Displacement detection type Atomic force microscope |
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