Packaging of nanostructured microelectromechanical systems microtriode devices

Combining the world of microelectromechanical systems (MEMS) with that of nano can lead to new devices with unique or advanced functionalities. Carbon nanotubes are fascinating new nanomaterials with many interesting physical, chemical, and electronic properties and potential new applications. We have incorporated nanotubes into the MEMS structure as patterned, cold-cathode field emitters to create on-chip, miniature vacuum tubes of microtriodes that can be useful for high-frequency microwave communications. Proper bonding and assembly processes were essential in providing reliable electrical connections and improved amplification performances.