微细电火花加工设备技术研究

微细电火花加工的关键设备技术涉及电极的微进给伺服机构、电极和工件的附加树对运动机构、微小能量放电电源以及加工状态检测与控制系统等。文章围绕微细电火花加工系统的设计系统，介绍基于压电致动原理以及摩擦传动的微进给机构、工具电极的线放电磨削机构和旋转主轴、以及微小能量放电电源的设计等，并指出需要进一步研究的课题。

Research on Micro EDM Tools

The key components of a micro EDM tool include micro feed mechanism of electrode, attached unit producing relative movement between electrode and workpiece, micro pulse power supply and a subsystem to detect and control machining process, etc. This paper introduces the design of micro feed mechanisms based on piezoelectric actuation and friction drive, wire electro discharge grinding (WEDG) unit and rotating head for making microelectrode, and pulse power supply for micro electro discharge generation. The problems should be studied further are also discussed.