| ZnS窗口上过渡层的研究 |
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| 引用本文： | 雷青松,孙亦宁. ZnS窗口上过渡层的研究[J]. 真空与低温, 1999, 5(1): 21-23 |
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| 作者姓名： | 雷青松 孙亦宁 |
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| 作者单位： | 兰州物理研究所 |
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| 摘 要： | 研究采用ＡｌＮ为过渡层在ＺｎＳ红外光学窗口材料上进行金刚石膜保护。还对膜进行结构分析和光学测试。
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| 关 键 词： | ZnS 金刚石膜 过渡层 射频磁控溅射 |
STUDIES ON THE BUFFER LAYERS OF ZnS WINDOWS |
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| Lei Qingsong Sun Yining Guo Wantu Cui Jingzhong. STUDIES ON THE BUFFER LAYERS OF ZnS WINDOWS[J]. Vacuum and Cryogenics, 1999, 5(1): 21-23 |
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| Authors: | Lei Qingsong Sun Yining Guo Wantu Cui Jingzhong |
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| Abstract: | AlN was used as an interlayer between ZnS, which is an infrared optical windouw material ,and CVD diamond protecting film .The structural and optical properties of the film were analyzed also. |
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| Keywords: | ZnS diamond film buffer layer RF magnetron sputtering |
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