Accuracy evaluation for sub-aperture interferometry measurements of a synchrotron mirror using virtual experiments |
| |
Authors: | Axel Wiegmann Manuel StavridisMonika Walzel Frank SiewertThomas Zeschke Michael SchulzClemens Elster |
| |
Affiliation: | a Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany b Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, D-10587 Berlin, Germany c Helmholtz Zentrum Berlin/BESSY-II, Albert-Einstein-Str. 15, D-12489 Berlin, Germany |
| |
Abstract: | We present a virtual experiment for the accuracy assessment of the sub-aperture interferometric measurement of a synchrotron mirror involving several thousand sub-aperture topographies. The virtual experiment simulates the measurement process and accounts for the influence of positioning device errors, interferometer errors, non-perfect calibration of machine geometry as well as errors in the interferometer reference. Two principles are considered for reconstructing the form of a test specimen from the conducted sub-aperture topographies, a stitching procedure and a direct measurement method. The virtual experiments are applied to the task of absolute form measurement (including its radius of curvature) of a synchrotron mirror with a length of 30 cm, a width of 4 cm, a maximum curvature of about 44 mm−1 and a peak-to-valley of 5 mm. As a result, reconstruction accuracies can be expected to be in the range of 100 nm when the stitching method is applied, which outperforms the direct measurement method by a factor of about 3. |
| |
Keywords: | Interferometry Stitching Simulation Virtual experiment |
本文献已被 ScienceDirect 等数据库收录! |
|