MOCVD-grown homoepitaxial YBa2Cu3Ox thin films and its multilayers

YBa₂Cu₃O _x (YBCO) films, Zn-doped YBCO (YBCO : Zn) films, and their bilayers have been epitaxially grown on SrTiO₃(100) and single-crystal YBCO(001) substrates by metalorganic chemical vapour deposition. The YBCO(001) films homoepitaxially grown on YBCO(001) substrates have flat surfaces on an atomic scale, and interfaces free from crystalline defects. We can systematically reduce the superconducting transition temperature (T _c) of YBCO : Zn films from 90 K to 37 K by increasing Zn concentration. The bilayers have a sharp distribution of Zn as evaluated fromT _c measurements of the upper YBCO films and depth profiles of secondary ion mass spectrometer, suggesting the possibility to form the homoepitaxial SNS (S, superconductor; N, normal metal) junction operatable between 40 K and 90 K.