| 高分子聚合物材料激光处理及其在微电子工业中应用 |
| |
| 引用本文： | 赵刚,张兵临.高分子聚合物材料激光处理及其在微电子工业中应用[J].光电子技术,1998,18(1):66-73. |
| |
| 作者姓名： | 赵刚 张兵临 |
| |
| 作者单位： | 中国科学院安徽光学精密机械研究所!230032(赵刚，恭知本，刘文清，文公毼)，郑州大学物理工程学院!450052(H.M.Phillips，张兵临) |
| |
| 基金项目： | 国家自然科学基金!69578019 |
| |
| 摘 要： | 综合介绍了激光处理聚酰亚胺等高分子聚合材料及其在微电子工业中一些新的应用，阐述了材料在吸收激光能量后产生的一系列可能会发生的能量转换和一些令人感兴趣的改性。此外还着重介绍了聚酰亚胺材料的激光感应电导在近几年的研究进展以及我们在这方面的研究工作，这一工作在精细加工微制造工业，尤其是在对提高集成电路的集成度，缩小集成电路内部器件尺寸等方面有广泛的应用前景。
|
| 关 键 词： | 聚酰亚胺 激光感应电导 激光加工 VLSI |
Laser Processing of Induced Polymers: Application in Microelectronic Industry |
| |
| Zhao Gang, H. M. Phillips, Zhang Binlin, Gong Zhiben, Liu Wenqing, Wen Gongling.Laser Processing of Induced Polymers: Application in Microelectronic Industry[J].Optoelectronic Technology,1998,18(1):66-73. |
| |
| Authors: | Zhao Gang H M Phillips Zhang Binlin Gong Zhiben Liu Wenqing Wen Gongling |
| |
| Abstract: | The combination of new materials and new techniques provide a powful surport for the development of microelectronic industry. The new application of laser technique in microeletronic industry, which can reduce the size of device in lithograthy production, was introduced. Some polymers' characteristics and applications in microelectronic industry have been listed. The pathway of energy transportation during the laser-material interaction was illuminated. At last, the recent research progress of laser induced conductivity of polyimide has been reviewed. |
| |
| Keywords: | polyimide laser induced conductivity lithograthy production microeletronic industry |
| 本文献已被 CNKI 维普 等数据库收录！ |
