| 椭球反射镜膜厚均匀性与工艺技术的探讨 |
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| 引用本文： | 高丽峰,熊胜明,张云洞,黄伟,叶红伟.椭球反射镜膜厚均匀性与工艺技术的探讨[J].光电工程,2000,27(5):69-72. |
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| 作者姓名： | 高丽峰 熊胜明 张云洞 黄伟 叶红伟 |
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| 作者单位： | 中国科学院光电技术研究所,四川,成都,610209 |
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| 摘 要： | 讨论了深紫外曝光系统中椭球反射镜镀制装置在薄膜沉积中的镀制条件对膜厚和膜厚均匀性的影响，计算了椭球镜的膜厚均匀性并对如何改善椭球镜膜厚分布作了介绍，实验得到均匀性符合要求的反射镜。
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| 关 键 词： | 椭球反射镜 膜厚均匀性 镀膜技术 薄膜 曝光系统 |
| 修稿时间： | : |
An Investigation for Coating Thickness Uniformity and Technology of Ellipsoidal Mirror |
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| GAO Li-feng,XIONG Sheng-ming,ZHANG Yun-dong,HUANG Wei,YE Hong-wei.An Investigation for Coating Thickness Uniformity and Technology of Ellipsoidal Mirror[J].Opto-Electronic Engineering,2000,27(5):69-72. |
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| Authors: | GAO Li-feng XIONG Sheng-ming ZHANG Yun-dong HUANG Wei YE Hong-wei |
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| Abstract: | The influence of coating conditions in ellipsoidal mirror coating chamber on coating thickness and coating thickness uniformity of deep ultraviol et exposure system is discussed.The coating thickness uniformity on ellipsoidal mirror is calculated and the method for improving the coating thickness distribu tion is introduced.The ellipsoidal mirrors which its coating thickness uniformit y conforms with the requirements are obtained in experiments. |
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| Keywords: | Ellipsoidal mirrors Coating thickness uniformity Coati ng techniques |
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