| 硅材料中磷含量的分析方法综述 |
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| 引用本文： | 韩小月,李晓华,赵建为,张云晖.硅材料中磷含量的分析方法综述[J].当代化工,2014(11):2469-2471. |
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| 作者姓名： | 韩小月 李晓华 赵建为 张云晖 |
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| 作者单位： | 昆明冶研新材料股份有限公司,云南 昆明,650031 |
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| 摘 要： | 综述了近10年来硅材料中磷含量的分析方法,方法主要包括电感耦合等离子体原子发射光谱法、二次离子质谱法、X-射线荧光光谱法、分光光度法等,并对每一种方法的应用情况作了简要的评述。
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| 关 键 词： | 硅 磷 分析 综述 |
Review of Analysis Methods of Phosphorus Content in Silicon Materials |
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| HAN Xiao-yue
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LI Xiao-hua
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ZHAO Jian-wei
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ZHANG Yun-hui.Review of Analysis Methods of Phosphorus Content in Silicon Materials[J].Contemporary Chemical Industry,2014(11):2469-2471. |
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| Authors: | HAN Xiao-yue LI Xiao-hua ZHAO Jian-wei ZHANG Yun-hui |
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| Affiliation: | (Kunming Yeyan New-Material Co., Ltd., Yunnan Kunming 650031, China) |
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| Abstract: | Analysis methods of phosphorus content in silicon materials in recent 10 years were reviewed, such as inductively coupled plasma atomic emission spectrometer, secondary ion mass spectrometer, X-ray fluorescence spectrometry, spectrophotometry and so on. Application of every method was discussed. |
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| Keywords: | Silicon Phosphorus Analysis Review |
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