| 射频等离子体自偏压及其对聚合成膜的影响 |
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| 引用本文： | 庞华,葛袁静,张跃飞,张广秋. 射频等离子体自偏压及其对聚合成膜的影响[J]. 北京印刷学院学报, 2003, 11(4): 19-23 |
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| 作者姓名： | 庞华 葛袁静 张跃飞 张广秋 |
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| 作者单位： | 北京印刷学院,等离子体科学及材料实验室,北京,102600 |
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| 摘 要： | 通过实验分析了射频等离子体自偏压的产生及与电子密度、电子温度的关系和对聚合成膜质量的影响并探讨了其机制，指出产生自偏压可明显改善等离子体聚合成膜质量，这是由于自偏压提高了等离子体中电子温度和电子密度的结果。在直接利用等离子体进行聚合反应制备薄膜时，应根据装置条件选择合适的自偏压值。
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| 关 键 词： | 射频等离子体 自偏压 电子温度 电子密度 等离子体聚合 |
| 文章编号： | 1004-8626(2003)04-0019-05 |
| 修稿时间： | 2003-10-29 |
Study on Radio Frequency Plasma Self-voltage and the Influence on Polymer |
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| PANG Hua,GE Yuan-jing,ZHANG Yue-fei,ZHANG Guang-qiu. Study on Radio Frequency Plasma Self-voltage and the Influence on Polymer[J]. Journal of Beijing Institute of Graphic Communication, 2003, 11(4): 19-23 |
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| Authors: | PANG Hua GE Yuan-jing ZHANG Yue-fei ZHANG Guang-qiu |
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| Abstract: | The occurrence of radio frequency plasma self|voltage, the relation among electron temperature,electron density and self|voltage and the influence on plasma polymer qualities are analyzed through the experiment. At the same time the mechanism of radio frequency plasma self|voltage is discussed. Experiment results show qualities of plasma polymer are obviously improved, as electron temperature and electron density are increased by self|voltage. Appropriate self|voltage should be chosen according to the device when films are prepared by plasma polymerization. |
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| Keywords: | radio frequency plasma self|voltage electron temperature electron density plasma polymerization |
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