| 硅压阻式压力传感器的现场可编程自动补偿技术 |
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| 引用本文： | 袁智荣,郭和平. 硅压阻式压力传感器的现场可编程自动补偿技术[J]. 传感器与微系统, 2008, 27(11) |
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| 作者姓名： | 袁智荣 郭和平 |
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| 作者单位： | 1. 西北工业大学三六五所,陕西,西安,710072
2. 西安中星测控有限公司,陕西,西安,710065 |
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| 摘 要： | 为了提高硅压阻式压力传感器温度性能指标,并实现快速补偿,通过以ADμC816微处理器为核心设计了智能压力传感器,提出了传感器在宽温区下测量误差的自动补偿办法,通过对IC sensor系列压力传感器的应用,使其温度性能提高了1~2个数量级。
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| 关 键 词： | 硅压阻 压力传感器 下载 自动补偿 |
Local programmable automatic compensation technology of silicon piezoresistive pressure sensor |
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| YUAN Zhi-rong,GUO He-ping. Local programmable automatic compensation technology of silicon piezoresistive pressure sensor[J]. Transducer and Microsystem Technology, 2008, 27(11) |
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| Authors: | YUAN Zhi-rong GUO He-ping |
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| Abstract: | In order to improve the temperature performance of the silicon piezoresistive pressure sensor and achieve rapid compensation,a smart pressure sensor based on ADμC816 microprocessor is designed,and a automatic compensation mean is introduced for the measurement error under wide temperature range.The result presents that the temperature performance of the IC sensor series of pressure sensor is improved 1~2 order of magnitude by this way. |
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| Keywords: | silicon piezoresistive pressure sensor download auto-compensation |
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