| 硅光微电机械系统:光学元件与传感器 |
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| 引用本文： | 1 Introduction Using Micro-Electro-Mechanical System(MEMS)technology, many devices and systems canbe miniaturized. Micro pressure sensors and micro accelerometers(air-bag sensor) areexamples that are widely commercialized. In the case of optical system,some opticalcomponents need to be combined to implement the function desired for optical processing. ……. 硅光微电机械系统:光学元件与传感器[J]. 光学精密工程, 2002, 10(6): 632-633 |
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| 作者姓名： | 1 Introduction Using Micro-Electro-Mechanical System(MEMS)technology many devices and systems canbe miniaturized. Micro pressure sensors and micro accelerometers(air-bag sensor) areexamples that are widely commercialized. In the case of optical system some opticalcomponents need to be combined to implement the function desired for optical processing. …… |
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| 作者单位： | Dept. Mechatronics and Precision Engineering, Tohoku University, Sendai 980-8579, Japan |
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| 摘 要： | 1 IntroductionUsing Micro-Electro-Mechanical System(MEMS)technology, many devices and systems can be miniaturized. Micro pressure sensors and micro accelerometers(air-bag sensor) are examples that are widely commercialized. In the case of optical system,some optical components need to be combined to implement the function desired for optical processing.
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Silicon optical MEMS : optical components and sensors |
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| Kazuhiro Hane. Silicon optical MEMS : optical components and sensors[J]. Optics and Precision Engineering, 2002, 10(6): 632-633 |
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| Authors: | Kazuhiro Hane |
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| Abstract: | 1 Introduction Using Micro-Electro-Mechanical System(MEMS)technology, many devices and systems can be miniaturized. Micro pressure sensors and micro accelerometers(air-bag sensor) are examples that are widely commercialized. In the case of optical system,some optical components need to be combined to implement the function desired for optical processing. |
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