| 飞秒激光烧蚀研究进展 |
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| 引用本文： | 倪晓昌,王清月. 飞秒激光烧蚀研究进展[J]. 激光与光电子学进展, 2002, 39(12): 4-9 |
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| 作者姓名： | 倪晓昌 王清月 |
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| 作者单位： | 天津大学精密仪器与光电子工程学院超快激光研究室光电信息技术科学教育部重点实验室,天津,300072 |
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| 摘 要： | 介绍飞秒激光烧蚀材料的机理论模型，阐述飞秒激光烧蚀的特性，揭示飞秒激光烧蚀的广泛应用前景。
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| 关 键 词： | 飞秒激光 烧蚀 微细加工 材料迁移 阈值 |
| 收稿时间： | 2002-07-08 |
| 修稿时间： | 2002-07-08 |
Research Progress of Femtosecond Laser Ablation |
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| Ni Xiaochang Wang Qingyue. Research Progress of Femtosecond Laser Ablation[J]. Laser & Optoelectronics Progress, 2002, 39(12): 4-9 |
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| Authors: | Ni Xiaochang Wang Qingyue |
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| Abstract: | The mechanism and the theoretical model of femtosecond laser ablation of materials are introduced, the properties of femtosecond laser ablation are explained, and the widespread application prospect is described. |
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| Keywords: | micromachining femtosecond laser ablation material removal |
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