Highly a-oriented SrBi2Ta2O9 thin film on (111) Pt/TiO2/SiO2/Si substrate by eclipse pulsed laser deposition |
| |
Authors: | J.Y. Son |
| |
Affiliation: | Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea |
| |
Abstract: | A highly a-oriented SrBi2Ta2O9 thin film with a polycrystalline structure was deposited on a preferentially oriented (111) Pt/TiO2/SiO2/Si substrate by eclipse pulsed laser deposition (PLD) method. The SrBi2Ta2O9 thin film exhibited flat and smooth surface with the surface roughness of about 0.5 nm resulting from reducing particulates generated by on-axis PLD. The SrBi2Ta2O9 thin film showed a good ferroelectric property with the high remanent polarization of 12 μC/cm2 and the low coercive electric field of 140 kV/cm. For the highly a-oriented SBT thin film, domain switching and reading were performed by Kelvin probe force microscope (KFM). The KFM data indicate a good ferroelectric property of the highly a-oriented SrBi2Ta2O9 thin film with high KFM signals that reflect ferroelectric polarizations. |
| |
Keywords: | Highly a-oriented SBT Eclipse pulsed laser deposition Domain switching Kelvin prove force microscope |
本文献已被 ScienceDirect 等数据库收录! |