In–Situ Transmission Electron Microscopy Crystallization Studies of Sol–Gel-Derived Barium Titanate Thin Films

Barium titanate (BaTiO₃) thin films that were derived from methoxypropoxide precursors were deposited onto (100) Si, Pt/Ti/SiO₂/(100) Si, and molecular-beam-epitaxy-grown (MBE-grown) (100) BaTiO₃ on (100) Si substrates by spin coating. The crystallization behavior of the amorphous-gel films was characterized using in-situ transmission electron microscopy heating experiments, glancing-angle X-ray diffraction, and differential thermal analysis/thermogravimetric analysis. Amorphous-gel films crystallized at a temperature of ∼600°C to an intermediate nanoscale (5–10 nm) barium titanium carbonate phase, presumably BaTiO₂CO₃, that subsequently transformed to nanocrystalline (20–60 nm) BaTiO₃. Random nucleation in the bulk of the gel film was observed on all substrates. In addition, oriented growth of BaTiO₃ was concurrently observed on MBE-grown BaTiO₃ on (100) Si. High-temperature decomposition of the intermediate carbonate phase contributed to nanometer-scale residual porosity in the films. High concentrations of water of hydrolysis inhibited the formation of the intermediate carbonate phase; however, these sols precipitated and were not suitable for spin coating.