Use of Virtual Medium in Designing of the CGH Wave Front Generator for Aspheric Testing

Design method and procedures of computer-generated hologram (CGH) used for aspheric test are introduced in detail.For CGH phase calculation,virtual medium which has zero refractive index at given wavelength is used to model ideal aspheric wavefront.Reflective Fresnel zones located in a ring area concentric to the CGH structure is designed to reduce or eliminate alignment errors.Substrate figure error,pattern distortion,etching and duty cycle variations that influence the reconstructed wavefront are quantitatively analyzed in theory and corresponding error equations are obtained to guide the tolerance distribution during CGH fabricating.A design example is given and the uncertainty of measurement achieves λ/20.