| 横向电压型压力传感器的磁敏性及其消除法 |
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| 引用本文： | 齐薇佳,鲍敏杭,于连忠. 横向电压型压力传感器的磁敏性及其消除法[J]. 半导体学报, 1988, 9(4): 439-442 |
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| 作者姓名： | 齐薇佳 鲍敏杭 于连忠 |
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| 作者单位： | 复旦大学电子工程系 上海(齐薇佳，鲍敏杭)，复旦大学电子工程系 上海(于连忠) |
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| 摘 要： | 横向电压型压力传感器的几何形状与霍尔器件相同因此也存在有磁敏性.本文用弱场近似的统计理论导出了非均匀掺杂薄层的霍尔电势表式,理论计算与实验结果相当一致.最后,介绍了一种实际上能完全消除磁场对压力传感器影响的方法,得到了很好的结果.
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| 关 键 词： | 传感器 压力 磁场 |
Magnetic Sensitivity and Magnetically Insensitive Design of Transverse Voltage Pressure Sensor |
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| Qi Weijia/. Magnetic Sensitivity and Magnetically Insensitive Design of Transverse Voltage Pressure Sensor[J]. Chinese Journal of Semiconductors, 1988, 9(4): 439-442 |
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| Authors: | Qi Weijia/ |
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| Affiliation: | Qi Weijia/Department of Electronic Engineering Fudan University,ShanghaiBao Minhang/Department of Electronic Engineering Fudan University,ShanghaiYu Lianzhong/Department of Electronic Engineering Fudan University,Shanghai |
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| Abstract: | As the geometry of transverse-vohage pressure sensor is similar to that of Hallelement,it is susceptible to the interference of magnetic field.From Boltzmann trans-portation equation in weak field,the expression of Hall voltage for an inhomogeneo-usly doped layer has been derived.The calculated results for a practical device agreewell with the experimental data.A method to eliminate the interference of magneticfield is described.The results are very satisfying. |
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| Keywords: | Transducer Sensor Pressure Magnetic field |
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