无机复合涂层对多孔氮化硅性能影响的研究

利用溶胶-凝胶法制备在多孔氮化硅的表面制备了无机复相陶瓷涂层,利用扫描电镜、红外光谱等手段研究了涂层的形貌和结构,并采用三点弯曲法研究了材料的力学性能,讨论了涂层前后基体的性能变化,结果表明:涂层对基体的抗弯有明显的提高,最大提高20%;用涂层封孔后后,材料的气孔率和吸水率明显下降,对多孔氮化硅介电性能影响很小。

Influence of inorganic composite coating on the properties of porous silicon nitride

In this research, ceramics coating was prepared by sol-gel method. The morphology and composition of the coating were discussed by SEM , Infrared spectrum and so on, and the mechanical properties of the material were studied with 3-point bending method, Performance change was discussed before and after coating. The results show that bending strength of porosity silicon nitride has been greatly improved after coating,can reach 20% ,the porosity and water absorption have obvious decline,while the effect on dielectric properties was very small.