| 碱催化多孔SiO_2/PI杂化薄膜的制备与力学性能研究 |
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| 引用本文： | 田晶,张瑾,赵鹤云,柳清菊.碱催化多孔SiO_2/PI杂化薄膜的制备与力学性能研究[J].功能材料,2010,41(1). |
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| 作者姓名： | 田晶 张瑾 赵鹤云 柳清菊 |
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| 作者单位： | 云南大学,云南省高校纳米材料与技术重点实验室,云南,昆明,650091 |
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| 基金项目： | 教育部新世纪优秀人才支持计划资助项目(NCET-04-0915);;云南省应用基础研究计划重点资助项目(2006E0001Z);;云南省教育厅科学研究基金资助项目(07Y41250);;云南省应用基础研究计划面上资助项目(2008CD076) |
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| 摘 要： | 采用碱催化正硅酸乙酯(TEOS)的溶胶-凝胶法与分子模板法相结合,通过旋转涂覆在硅衬底上制备掺杂聚酰亚胺(PI)的纳米多孔SiO2薄膜,并在其表面制备致密过渡膜。利用差热分析(DSC-TGA)、原子力显微镜(AFM)、台阶仪(Atomic-Profiler)、微纳力学性能测试仪(Universal Nano+Micro Mechanical Tester)等对薄膜的性能进行了分析表征。结果表明,所制备的SiO2/PI杂化多孔薄膜具有较好的力学性能和热稳定性;一层膜和两层膜的平均厚度分别为917和1288nm;镀有过渡膜的样品具有最为平整的表面形貌和最小的表面动摩擦系数。
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| 关 键 词： | 碱催化 纳米多孔SiO2/PI杂化薄膜 表面过渡层 力学性能 |
Preparation and mechanical properties of nanoporous SiO_2/PI hybrid film derived from base catalyzed TEOS |
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| TIAN Jing,ZHANG Jin,ZHAO He-yun,LIU Qin-ju.Preparation and mechanical properties of nanoporous SiO_2/PI hybrid film derived from base catalyzed TEOS[J].Journal of Functional Materials,2010,41(1). |
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| Authors: | TIAN Jing ZHANG Jin ZHAO He-yun LIU Qin-ju |
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| Affiliation: | Yunnan Key Laboratory of Nanomaterials & Nanotechnology;Yunnan University;Kunming 650091;China |
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| Abstract: | The nanoporous SiO2/PI hybrid thin film and the surface transition layer were prepared on silicon wafers via adopting base catalyzed TEOS sol-gel method,molecular template and spinning coating.The films were analyzed and characterized by DSC-TGA,AFM,Atomic Profiler method and Universal Nano+Micro Mechanical Tester.The results show that the nanoporous SiO2/PI hybrid thin film has good thermal stability and mechanical property.The average thickness of one-layer and two-layer film is 917 and 1288nm,respectivel... |
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| Keywords: | base catalyst morphology nanoporous SiO2/PI hybrid film surface transition layer mechanical properties |
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