相位差异的三反光学系统波前传感技术

分析了基于相位差异（Phase Diversity，PD）的波前传感技术的基本原理，针对该技术的目标函数自变量多、非线性程度较高等特点，提出基于遗传算法（Genetic Algorithm，GA）的改进相位差异技术。在传统目标函数的基础上增加了Tikhonov 正则项，提高了算法的稳定性和收敛效率；对光学系统利用PD 技术波前检测的噪声适应性进行了仿真分析；模拟了不同波前离焦量对检测精度的影响，获得最优的波前离焦相位值并应用于检测实验；利用PD 技术分别对离轴三反光学系统的中心视场和边缘视场进行波前检测，并将解算得到的Zernike 系数和波前图分别与干涉检验的结果进行对比。实验结果表明:相位差异技术与干涉检验的偏差小于0.013（RMS），其检测精度满足工程需求。

Wavefront sensing of three-mirror reflecting optical system phase diversity

The basic principles of wavefront sensing based on phase diversity (PD) were analyzed. An improved PD based on genetic algorithm (GA) was proposed for the multiple variables and nonlinear character of PD's objective function. A Tikhonov regularization function was added to the traditional objective function, and the stability and convergence efficiency were improved. The noise adaptability of wavefront testing by PD technology was simulated, and effect of various wavefront defocuses on the testing precision of PD technology was analyzed. The best wavefront defocus which can make PD reach the highest testing precision, and it was selected to apply in testing experiment. PD technology was applied to wavefront testing of central and marginal field of view in off-axis three-mirror reflecting optical systems. The Zernike coefficients solved and wavefront maps were compared with interferometric results respectively. Experimental results showed that the testing precision of PD technology was less than 0.013 (RMS), and the precision can satisfy the requirement of engineering.