| LIGA技术制造微流量计的研究 |
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| 引用本文： | 刘刚,田扬超,洪义麟,阚娅,张鹏,田学红,伊福廷. LIGA技术制造微流量计的研究[J]. 微细加工技术, 2000, 0(4): 73-76 |
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| 作者姓名： | 刘刚 田扬超 洪义麟 阚娅 张鹏 田学红 伊福廷 |
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| 作者单位： | 1. 中国科学技术大学国家同步辐射实验室,合肥,230026
2. 中国科学院高能物理所同步辐射室,北京,100039 |
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| 摘 要： | 介绍了利用ＬＩＧＡ技术中的同步辐射光刻、微电铸技术和微装配技术制作微流量计的研究，讨论了微流量计的结构和工作原理。设计和研制了一种微流量计。
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| 关 键 词： | 微流量计 LIGA 微装配 |
| 文章编号： | 1003-8213(2000)04-0073-04 |
| 修稿时间： | 2000-01-03 |
Study on fabrication of micro-flowmeter by LIGA technique |
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| LIU Gang,TIAN Yang-chao,HONG Yi-lin,KAN Ya,ZHANG Peng,TIAN Xue-haong,YI Fu-ting. Study on fabrication of micro-flowmeter by LIGA technique[J]. Microfabrication Technology, 2000, 0(4): 73-76 |
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| Authors: | LIU Gang TIAN Yang-chao HONG Yi-lin KAN Ya ZHANG Peng TIAN Xue-haong YI Fu-ting |
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| Affiliation: | LIU Gang ,TIAN Yang-chao ,HONGYi-lin ,KAN Ya ,ZHANG Peng ,TIAN Xue-haong ;(National Synchrotron Radiation laboratory, University of Science and technology of China,Hefei 230029, China) |
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| Abstract: | The fabrication of micro flowmeter using LIGA process and assembly technique is reported. The structure and principle of micro flowmeter is investigated. A kind of micro flowmeter has been designed and developed. The result indicates that the fabrication of micro flowmeter using LIGA process is successful. |
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| Keywords: | Micro flowmeter LIGA Micro assemblyD |
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