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由红外透过谱确定金刚石膜的光学常数及相关因素
引用本文:张继华,孙亦宁,李敬起,郭晚土,高欣.由红外透过谱确定金刚石膜的光学常数及相关因素[J].真空与低温,2001,7(3):144-148.
作者姓名:张继华  孙亦宁  李敬起  郭晚土  高欣
作者单位:兰州物理研究所,甘肃,兰州,730000
摘    要:结合金刚石膜的具体情况,考虑到色散效应、膜的微结构、表面粗糙度及样品中自由载流子和C-H的吸收等多种因素对红外透过谱的影响,在无吸收单层膜透过率模型的基础上进行了修正,给出了自支撑金刚石薄膜透过率的数学模型.并对不同制备方法和工艺参数下沉积的金刚石膜的红外透过谱用Levenberg-Mar-quardt算法进行非线性最小二乘拟合,从而确定出样品的红外光学常数和其它影响透过率的因素.这些结果对正确分析金刚石薄膜的红外光学性质是很重要的.

关 键 词:光学常数  透过率  金刚石
文章编号:1006-7086(2001)03-0144-05
修稿时间:2001年3月5日

DETERMINATION OF THE OPTICAL CONSTANTS AND RELATED FACTORS OF DIAMOND FROM TRANSMISSION MEASUREMENTS
ZHANG Ji_hua,SUN Yi_ning,LI Jing_qi,GUO Wan_tu,GAO Xin.DETERMINATION OF THE OPTICAL CONSTANTS AND RELATED FACTORS OF DIAMOND FROM TRANSMISSION MEASUREMENTS[J].Vacuum and Cryogenics,2001,7(3):144-148.
Authors:ZHANG Ji_hua  SUN Yi_ning  LI Jing_qi  GUO Wan_tu  GAO Xin
Abstract:By combining the reality of CVD diamond,transmittance model of free standing diamond films was derived.In the model,several factors affect transmittance such as chromatic dispersion, optical non_uniformity, surface roughness and absorption of the graphite (free carries) and carbon-hydrogen bonding in the sample-were considered.IR spectra of diamond was non_linear least square fitted(NLSF) by Levenberg_Marquardt algorithm.Reliable frequency dependence of n and k, together with thickness,surface roughness,impurities and microstructure were then obtained.This result will be important for a correct analysis of the IR properties of diamond films.
Keywords:optical constants  transmittance  diamond
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