| 溅射参量对SiC涂层Ti-6Al-4V显微组织的影响 |
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| 引用本文： | 王玉敏,符跃春,石南林,张德志,杨锐.溅射参量对SiC涂层Ti-6Al-4V显微组织的影响[J].金属学报,2004,40(4):359-362. |
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| 作者姓名： | 王玉敏 符跃春 石南林 张德志 杨锐 |
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| 作者单位： | 中国科学院金属研究所,沈阳,110016 |
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| 摘 要： | 利用磁控溅射法在SiC纤维上沉积Ti-6Al-4V涂层制备成先驱丝.在功率密度一定时,沉积速率和工作气压有关.环境温度对涂层表面形貌及涂层与纤维结合的影响较大.涂层成分接近Ti-6Al-4V,沿涂层厚度方向成分分布均匀.涂层中柱晶晶粒尺寸为20-50 nm,为α-Ti固溶体.
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| 关 键 词： | 钛基复合材料 磁控溅射 SiC纤维 先驱丝 镀层 |
| 文章编号： | 0412-1961(2004)04-0359-04 |
| 收稿时间： | 2003-02-24 |
| 修稿时间： | 2003年2月24日 |
EFFECTS OF SPUTTERING PARAMETER ON THE MICROSTRUCTURE OF Ti--6Al--4V COATING ON SiC FIBRE |
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| WANG Yumin,FU Yuechun,SHI Nanlin,ZHANG Dezhi,YANG Rui.EFFECTS OF SPUTTERING PARAMETER ON THE MICROSTRUCTURE OF Ti--6Al--4V COATING ON SiC FIBRE[J].Acta Metallurgica Sinica,2004,40(4):359-362. |
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| Authors: | WANG Yumin FU Yuechun SHI Nanlin ZHANG Dezhi YANG Rui |
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| Affiliation: | Institute of Metal Research, The Chinese Academy of Sciences, Shenyang 110016 |
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| Abstract: | The effects of sputtering parameters on the microstructure of Ti-6Al-4V coating on SiC(f) prepared by magnetron sputtering were studied. The results show that the deposition rate is related to the working pressure at a given power density. The morphology of the deposited layer and its binding with the fibre are dependent on temperature. The composition of the coat is close to Ti-6Al-4V, and is uniform throughout the thickness of the coat. The deposited layer consists of crystallites with nonequilibrium hep structure with grain size of 20-50 nm. The interface between SiC fibre and Ti-6Al-4V coating was investigated by scanning electron microcopy and energy dispersive X-ray spectroscopy. The examination reveals no chemical reaction at the fibre-coat interface which is in nature a sharp interface formed by bonding of the two substances. |
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| Keywords: | titanium matrix composite magnetron sputtering SiC fibre precursor wire coat |
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