基于有限元的圆锥螺旋MEMS弹簧非线性分析

弹簧作为控制机件运动、缓和冲击或震动、贮蓄能量的基本机械零件，它的作用在微机电系统（MEMS）中不可替代。设计一种应用于MEMS的圆锥形微弹簧，通过有限元方法对圆锥微弹簧非线性接触状态下，所表现的弹性特性进行了计算，得到微弹簧弹性特性曲线，并对微弹簧的非线性特性进行了分析，结果表明圆锥弹簧的刚度具有明显的非线性。有限元计算结果与理论公式计算结果基本一致，说明了采用有限元方法的可靠性。这种方法的采用对于微弹簧的优化、设计与加工具有实际意义。

Analysis of nonlinear conical helical MEMS spring based on the FEM

Spring plays an irreplaceable role in micro-electromechanical systems in controlling mechani- cal movements, easing shock or vibration and storing energy. This paper presents a micro-conical springs used in MEMS, and through the finite element method for nonlinear contact springs conical micro-state, the perform- ance of the elastic properties of the spring was calculated to obtain a micro-elastic spring characteristic curve, and micro-nonlinear spring characteristics were analyzed. The results show a significant conical spring nonlin- ear stiffness. Finite element calculation results and the theoretical formula calculation results are basically iden- tical, which also shows the reliability of the finite element method, The method is of practical significance in the optimization, design ang processing of the micro-spring.