MEMS |
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| Authors: | Sadiku M |
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| Affiliation: | Boeing Satellite Syst., Los Angeles, CA; |
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| Abstract: | MEMS (Micro-Electro-Mechanical Systems) technology has already taken root firmly in today's world. It is destined to become a hallmark 21st century manufacturing technology with numerous and diverse applications. MEMS will have a dramatic impact or everything from aerospace technology to biotechnology. As a breakthrough technology allowing unparalleled synergy between apparently unrelated fields of endeavour such as biology and microelectronics, MEMS is forecasted to have a commercial and defense market growth similar to its parent IC technology. The author presents a brief overview of this breakthrough technology, looking at the design, fabrication process, packaging, testing and applications |
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