| 基于交流量热法的薄膜热扩散率自动测试系统的研究 |
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| 引用本文： | 许自强,唐祯安,黄正兴,丁海涛.基于交流量热法的薄膜热扩散率自动测试系统的研究[J].仪器仪表学报,2005,26(8):797-801. |
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| 作者姓名： | 许自强 唐祯安 黄正兴 丁海涛 |
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| 作者单位： | 大连理工大学机械工程学院 大连116024
(许自强)，大连理工大学电子系 大连116024
(唐祯安，黄正兴)，大连理工大学机械工程学院 大连116024(丁海涛) |
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| 基金项目： | 系国家自然科学基金(59995550-5)资助. |
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| 摘 要： | 设计并组建了一套基于交流量热法的薄膜热扩散率的自动测试系统,实现了薄膜热扩散率的自动化测量。该系统以PC机为主控机,利用串口与运动控制卡通信,控制压电陶瓷超声电机实现采样点的精确定位,通过GPIB总线控制锁相放大器,采集位于待测薄膜表面上的微热电偶的温度响应信号。由温度信号的幅值与采样距离的关系得到薄膜的热扩散率。讨论了该系统的软硬件组成、测试原理及功能特性,并给出了系统软件的工作界面和测试数据。
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| 关 键 词： | 热扩散率 交流量热法 自动测试系统 GPIB总线 |
| 修稿时间： | 2003年12月1日 |
Study on Automated Test System of Thermal Diffusivity of Thin Films Based on AC Calorimetric Method |
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| Xu Ziqiang Tang Zhenan Huang Zhengxing Ding Haitao.Study on Automated Test System of Thermal Diffusivity of Thin Films Based on AC Calorimetric Method[J].Chinese Journal of Scientific Instrument,2005,26(8):797-801. |
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| Authors: | Xu Ziqiang Tang Zhenan Huang Zhengxing Ding Haitao |
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| Affiliation: | Xu Ziqiang~1 Tang Zhenan~2 Huang Zhengxing~2 Ding Haitao~1~1 |
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| Abstract: | A test system of thermal diffusivity of thin films based on AC calorimetric method was described, which carried out automated measurement of thermal diffusivity of thin films. A motion controller connected with a personal computer was used to control an ultrasonic piezo-ceramic motor to realize precise orientation. A programmable lock-in amplifier collected the temperature response from the micro thermocouple attached on the films and transmitted data to the computer through GPIB bus. The basic constitutes of hardware and software, working principle and character of the system were discussed and the working interface of the software and the testing data were given as well. |
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| Keywords: | Thermal diffusivity AC calorimetric method Automated measuring system GPIB bus |
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