On-chip Fabry-Pérot interferometric sensors for micro-gas chromatography detection |
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Authors: | Karthik ReddyAuthor Vitae Yunbo GuoAuthor VitaeJing LiuAuthor Vitae Wonsuk LeeAuthor Vitae Maung Kyaw Khaing OoAuthor VitaeXudong FanAuthor Vitae |
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Affiliation: | a Department of Biomedical Engineering, University of Michigan, 1101 Beal Avenue, Ann Arbor, MI 48109, United States b Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Avenue, Ann Arbor, MI 48109, United States c Engineering Research Center for Wireless Integrated Microsystems, University of Michigan, 1301 Beal Avenue, Ann Arbor, MI 48109, United States |
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Abstract: | We fabricated and characterized on-chip Fabry-Pérot (FP) vapor sensors for the development of on-column micro-gas chromatography (μGC) detectors. The FP sensors were made by coating a thin layer of polymer on a silicon wafer. The air-polymer and polymer-silicon interfaces form an FP cavity, whose resonance wavelengths change in response to the vapor absorption/desorption, thus allowing for rapid detection and quantification of vapors. For proof-of-concept, two polymers (PDMS and SU-8) were used independently and placed in an array in a microfluidic channel, and showed different sensitivities for different vapors. A sub-nano-gram detection limit and sub-second response time were achieved, representing orders of magnitude improvement over those previously reported. This on-chip design will enable the unprecedented integration of optical vapor sensors with μGC systems. |
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Keywords: | Vapor sensing Optical vapor sensor Fabry-Pé rot cavity Micro-gas chromatography Volatile organic compounds |
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