| 大功率脉冲激光光斑面积的实时控制系统 |
| |
| 引用本文： | 张峰烈,傅星,林谦,胡小唐.大功率脉冲激光光斑面积的实时控制系统[J].传感器与微系统,2012,31(1):127-129,132. |
| |
| 作者姓名： | 张峰烈 傅星 林谦 胡小唐 |
| |
| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室,天津,300072 |
| |
| 基金项目： | 天津市重大科技攻关计划资助项目 |
| |
| 摘 要： | 讨论了大功率脉冲激光光斑面积的实时检测与控制方法,研制了采用波长532 nm的连续激光器和CCD—FPGA技术来脉冲激光光斑面积实时控制系统。实验分析了本系统的技术特性:激光光斑、CCD视频信号以及二值化信号;CCD视频信号二值化阈值为405 mV,而FPGA的控制误差范围为十进制数24;计算及标定激光光斑面积,光斑面积测量的相对误差最大为0.5%,而绝对误差在8μm2范围内。本系统可以直接应用于激光微抛光的能量密度实时控制。
|
| 关 键 词： | 脉冲激光 光斑面积 实时控制 图像二值化 激光微抛光 |
Real-time control system for spot area of high power pulsed laser |
| |
| ZHANG Feng-lie
,
FU Xing
,
LIN Qian
,
HU Xiao-tang.Real-time control system for spot area of high power pulsed laser[J].Transducer and Microsystem Technology,2012,31(1):127-129,132. |
| |
| Authors: | ZHANG Feng-lie FU Xing LIN Qian HU Xiao-tang |
| |
| Affiliation: | (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University,Tianjin 300072,China) |
| |
| Abstract: | Real-time detection and control method for spot area of high-power pulsed laser is discussed.The laser spot area real-time control system that adopts a continuous laser whose wavelength is 532 nm and CCD-FPGA technology is developed.The characteristics of system are analyzed according to several experiments inlcuding the analysis for laser spot,CCD video signal and binarization signal.The binarization threshold of CCD video signal is 405 mV,FPGA’s control error range is 24 which is 10 binary.Calculation and calibration of laser spot area,the maximum relative measurement error of spot area is 0.5 % and the absolute error range is 8 μm2.The system can be directly applied in real-time control for the laser fluence in laser micro-polishing. |
| |
| Keywords: | pulsed laser spot area real-time control image binarization laser micro-polishing |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
