| 平面薄膜电感的研究与开发现状 |
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| 引用本文： | 唐晓莉,苏桦,张怀武. 平面薄膜电感的研究与开发现状[J]. 磁性材料及器件, 2003, 34(2): 37-38 |
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| 作者姓名： | 唐晓莉 苏桦 张怀武 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川成都,610054 |
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| 摘 要： | 为满足电子系统的表面贴装技术、微组装技术发展的需要，对器件片式化、小型化、微型化的要求越来越高。而电感作为电路的三大基础性元件之一，其片式化、薄膜化势在必行。本文就近几年国内外片式薄膜电感的发展研究状况做一综述。
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| 关 键 词： | 薄膜电感 结构 工艺 |
| 文章编号： | 1001-3830(2003)02-0037-02 |
| 修稿时间： | 2002-09-09 |
The Present Situation on the Research and Development of Thin-film Inductor |
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| TANG Xiao-li,SU Hua,ZHANG Huai-wu Institute of Micro-electronics and Solid-state Electronics,University of Electronic Science and Technology,Chengdu ,China. The Present Situation on the Research and Development of Thin-film Inductor[J]. Journal of Magnetic Materials and Devices, 2003, 34(2): 37-38 |
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| Authors: | TANG Xiao-li SU Hua ZHANG Huai-wu Institute of Micro-electronics Solid-state Electronics University of Electronic Science Technology Chengdu China |
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| Affiliation: | TANG Xiao-li,SU Hua,ZHANG Huai-wu Institute of Micro-electronics and Solid-state Electronics,University of Electronic Science and Technology,Chengdu 610054,China |
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| Abstract: | To satisfy the requirement of the growing surface mount technology (SMT) and microelectronic packaging technology (MPT), film chip and miniature components are in great demand, such as inductor one of the three basic electronic components. This paper summarizes the research and development of thin-film inductor in recent years. |
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| Keywords: | thin-film inductor structure technology |
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