| 钢表面化学气相沉积TiC晶体的择优取向 |
| |
| 引用本文： | 郭成言,後藤孝,平井敏雄.钢表面化学气相沉积TiC晶体的择优取向[J].金属学报,1992,28(7):85-89. |
| |
| 作者姓名： | 郭成言 後藤孝 平井敏雄 |
| |
| 作者单位： | 吉林工学院材料工程系，日本东北大学，日本东北大学 长春 130012 |
| |
| 摘 要： | 本文用化学气相沉积(CVD)法,以TiCl_4-CH_4-H_2为原料气体,在不锈钢表面获得了致密的TiC膜.研究了TiC的成膜速度、表面形貌和晶体择优取向与沉积条什的关系.结果表明,沉积温度T_(dep),碳钛比CH_4/TiCl_4强烈地影响了TiC的成膜速度、表面形貌和晶体择优取向.CH_4/TiCl_4低时,TiC晶体的择优取向为(220):而CH_4/TiCl_4高时,TiC晶体的择优取向为(200).TiC晶体的择优取向主要取决于气氛中活性碳的平衡浓度。
|
| 关 键 词： | 择优取向 成膜速度 TiC膜 不锈钢 |
| 收稿时间： | 1992-07-18 |
| 修稿时间： | 1992-07-18 |
PREFERRED ORIENTATION OF DEPOSITED TiC COATING ON STEEL BY CVD |
| |
| GUO Chengyan ,GOTO Takashi,HIRAI Toshio.PREFERRED ORIENTATION OF DEPOSITED TiC COATING ON STEEL BY CVD[J].Acta Metallurgica Sinica,1992,28(7):85-89. |
| |
| Authors: | GUO Chengyan GOTO Takashi HIRAI Toshio |
| |
| Affiliation: | GUO Chengyan (Jilin Institute of Technology,Changchun),GOTO Takashi,HIRAI Toshio (Tohoku University,Japan) |
| |
| Abstract: | Investigation was made of the deposition rate, surface morphology and crystal preferred orientation of the dense TiC coating onto austenitic stainless steel in relation with CH_4/TiCl_4 mole ratio and temperature adopted in CVD processing. When the CH_4/TiCl_4 ratio is low or high, their preferred orientation may be (220) or (200), respectively, which is mainly dependent on the equilibrium concentration of active carbon in vapour phase. |
| |
| Keywords: | TiC coating preferred orientation deposition rate surface morphology |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《金属学报》浏览原始摘要信息 |
|
点击此处可从《金属学报》下载全文 |
|
