主光轴平行于基底的微透镜阵列设计与制作

用聚二甲基硅氧烷(PDMS)软光刻工艺实现了一种主光轴平行于基底的微透镜阵列。首先对微透镜形成过程中的PDMS薄膜受力和变形情况进行了分析,并采用有限元分析方法对不同压力、不同厚度的薄膜变形情况进行了模拟,确定了合理的微透镜腔体结构;然后利用SU-8负模制作了PDMS微透镜腔体,将腔体与盖片进行了密闭封装,通过一定的压力向其注入紫外固化光学胶成型了微透镜阵列;最后使用自制装置对微透镜阵列的聚焦效果进行了测试。结果表明,提出的制作方法简单易行、成本低廉和焦距可控,而且易与其它的微系统集成到同一芯片。

Design and fabrication of microlens array with primary optical axis parallel to the substrate

A microlens array with optical axis pa rallel to the substrate has been designed and implemented using polydimethylsiloxane (PDMS) soft lithography proc ess.At first,the deformation and the force-bearing of the thin PDMS membranes in microlens forming process a re analyzed.The finite element method is carried out to investigate the deformation of thin membranes with di fferent thicknesses and different pressures,and the reasonable microlens chamber structure is established.Then a microlens chamber is fabricated on an SU-8negative mold,and the chamber is sealed to a cover plate by using bonding technique.The curable polymers are injected into the lens chamber and cured while pressure is applied to keep the PDMS membranes deformed and generate a microlens array.Finally,the focusing effect of the microlens is tested by a homemade device.Results show that this method is simple,economically feasible,with controllable focal le ngth,and makes it particularly easy for integration with other micro systems,which may open up new possibilities for med ical detections and communications.