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Towards better scanning near-field optical microscopy probes — progress and new developments
Authors:H. Heinzelmann,J. M. Freyland,R. Eckert,TH. Huser,G. Schü  rmann,W. Noell,U. Staufer,&   N. F. De Rooij
Affiliation:Department of Physics and Astronomy, University of Basel, Klingelbergstrasse 82, 4056 Basel, Switzerland,;Institute of Microtechnology, University of Neuchâtel, Rue Jaquet-Droz 1, CH-2007 Neuchâtel, Switzerland
Abstract:Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30–50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
Keywords:Aperture formation    focused ion beam milling    microfabricated tips    near-field optical probes    polarization contrast.
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