Monolithic integration of 5 V CMOS and high-voltage devices |
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| Authors: | Huang Q Amaratunga GAJ Humphrey J Narayanan EMS Milne WI Starbuck CM |
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| Affiliation: | Dept. of Eng., Cambridge Univ.; |
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| Abstract: | A fully CMOS-compatible HVIC technology has been developed that features 5 V high-performance digital CMOS with high-voltage devices of more than 400 V. This technology uses only one or two masks in addition to standard p-well CMOS technology. Design optimization has been achieved to meet the needs of both CMOS and high-voltage devices. A large number of different devices are available in this technology, including bipolar transistors, lateral MOS gate power devices, and high-voltage p-channel power devices |
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