Variable energy positron beam characterization of defects in as-grown and annealed low temperature grown GaAs |
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Authors: | M T Umlor D J Keeble P W Cooke P Asoka-Kumar K G Lynn |
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Affiliation: | (1) Department of Physics, Michigan Technological University, 49931 Houghton, MI;(2) GEO-Centers, Inc., Fort Monmouth, 07703 Operations, NJ;(3) Department of Physics, Brookhaven National Laboratory, 11973 Upton, NY;(4) Present address: GEO-Centers, Inc., 07849 Lake Hopatcong, NJ |
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Abstract: | Variable energy positron annihilation measurements on as-grown and annealed GaAs grown by molecular beam epitaxy at temperatures
between 230 and 350°C have been performed. Samples were subjected to either isochronal anneals to temperatures in the range
300 to 600°C or rapid thermal anneals to 700, 800, and 900°C. A significant increase in the S-parameter was observed for all
samples annealed to temperatures greater than 400°C. The positron annihilation characteristics of the defect produced upon
annealing are consistent with divacancies or larger vacancy clusters. The concentration of as-grown and anneal generated defects
is found to decrease with increasing growth temperature. |
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Keywords: | LT-GaAs positron annihilation vacancy |
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