Beam Current Dependence of SEM Electron Probe Diameter |
| |
Authors: | Yu. A. Novikov A. V. Rakov M. N. Filippov |
| |
Abstract: | A method has been developed for measuring the dependence of the electron probe diameter d in a scanning electron microscope SEM on the beam current J. The relationship for the CAMSCAN CS-44 SEM is d(J) ~ J1/4, whereas electron probe formation theory gives d(J) ~ J3/8; the reasons for these differences are considered. |
| |
Keywords: | electron probe probe diameter SEM |
本文献已被 SpringerLink 等数据库收录! |