Miniature and tunable millimeter-wave lowpass filter with MEMS switch |
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Authors: | XL Guo Y Jin |
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Affiliation: | a School of Electronics and Information, Nan Tong University, Seyuan Rd. 9, 226019 Nantong, Jiangsu, China b Institute of Microsystem and Information Technology, CAS, Chang Ning Rd. 865, 200050 Shanghai, China |
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Abstract: | In this paper, fully monolithic tunable millimeter-wave filters with tapped-line feedings are proposed using the CPW-based periodic structures with novel multiple-contact MEMS switches. Millimeter-wave low-pass filters were designed, fabricated, and tested. The cascaded CPW-based periodic structures, with low-pass intrinsic filtering characteristics, are reconfigured into a self-similar single unit cell by the operation of the novel multiple-contact MEMS switches with single actuation. The measured results of the reconfigurable low-pass filter show the 3-dB cutoff frequency change from 19 to 11 GHz with very small change in the average insertion loss from 1.3 to 1.9 dB. The chip size of the low-pass is 4.0 mm × 1.6 mm. |
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Keywords: | Tunable filters Multiple-contact MEMS switches Self-similar structures |
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