| 基于MEMS超级电容器的高介电常数CaCu3Ti4O12薄膜制备及电学特性研究 |
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| 引用本文： | 赵清华,高雅,段倩倩,史健芳,李刚.基于MEMS超级电容器的高介电常数CaCu3Ti4O12薄膜制备及电学特性研究[J].稀有金属材料与工程,2018,47(7):2252-2256. |
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| 作者姓名： | 赵清华 高雅 段倩倩 史健芳 李刚 |
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| 作者单位： | 太原理工大学S信息工程学院S微纳系统研究中心,太原理工大学S信息工程学院S微纳系统研究中心,太原理工大学S信息工程学院S微纳系统研究中心,太原理工大学S信息工程学院S微纳系统研究中心,太原理工大学S信息工程学院S微纳系统研究中心 |
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| 基金项目： | 国家自然科学青年基金( 51505324)、省基础研究计划项目(2014011019-1、20141001021-2) |
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| 摘 要： | 相对于电化学超级电容器,静电式电容器具有更高的功率密度和可靠性,但能量密度过低。本文提出制备基于高介电常数薄膜CaCu3Ti4O12(CCTO)的高能量密度MEMS静电式超级电容器。首先,以硅片为基底,通过溶胶-凝胶法在不同烧结温度(700℃、800℃、900℃)下制备CCTO薄膜,分别采用X射线衍射仪(XRD)和场发射扫描电镜(FE-SEM)对薄膜的形貌、组分和结晶状况进行表征,发现在800℃烧结温度下CCTO薄膜结晶状况最佳。然后,利用金属-绝缘层-半导体结构测试其I-V和C-V特性,计算得到薄膜的最大阈值电压和能量密度分别为47V和3.2J/cm3。同时,首次对高介电常数介质膜中存在的介质充电现象进行了研究,并分析了介质充电对静电式超级电容器性能的影响。
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| 关 键 词： | 高介电常数薄膜 MEMS 静电式超级电容器 介质充电 |
| 收稿时间： | 2016/6/14 0:00:00 |
| 修稿时间： | 2016/9/14 0:00:00 |
The preparation and electrical properties of CaCu3Ti4O12 films with high dielectric constant based on MEMS supercapacitors |
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| ZhaoQinghu,Gao Y,Duan Qianqian,Shi Jianfang and Li Gang.The preparation and electrical properties of CaCu3Ti4O12 films with high dielectric constant based on MEMS supercapacitors[J].Rare Metal Materials and Engineering,2018,47(7):2252-2256. |
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| Authors: | ZhaoQinghu Gao Y Duan Qianqian Shi Jianfang and Li Gang |
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| Affiliation: | MicroNano System research Center,Key Lab of Advanced Transducers and Intelligent Control System Ministry of Education College of Information Engineering,Taiyuan University of Technology,Taiyuan,Shanxi,MicroNano System research Center,Key Lab of Advanced Transducers and Intelligent Control System Ministry of Education College of Information Engineering,Taiyuan University of Technology,Taiyuan,Shanxi,MicroNano System research Center,Key Lab of Advanced Transducers and Intelligent Control System Ministry of Education College of Information Engineering,Taiyuan University of Technology,Taiyuan,Shanxi,MicroNano System research Center,Key Lab of Advanced Transducers and Intelligent Control System Ministry of Education College of Information Engineering,Taiyuan University of Technology,Taiyuan,Shanxi,MicroNano System research Center,Key Lab of Advanced Transducers and Intelligent Control System Ministry of Education College of Information Engineering,Taiyuan University of Technology,Taiyuan,Shanxi |
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| Abstract: | |
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| Keywords: | high dielectric constant thin film MEMS Electrostatic supercapacitors dielectric charging |
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