空分复用压电自感知执行器执行与传感效果研究

结构振动主动控制可以采用压电自感知执行器。空分复用解耦方法是实现压电自感知执行器的一种新方法，实质是采用几何方法解耦，即将压电片的一个完整电极分割为执行区和传感区以实现自感知。本文以悬臂梁为对象，以涡流位移计作为标准传感器，对两种电极分割方式的压电片的传感和执行效果进行了实验研究。通过测量压电梁的频率特性，证明了空分复用的压电陶瓷片同时兼有传感和执行两种功能。实验结果也表明传感区的敏感输出受到执行区激励电压的静电耦合的影响，利用悬臂梁存在反谐振点的特性，提出了一种定量测量静电耦合的方法，并测定了不同电极宽度、不同极间隙下的静电耦合系数。本文的工作为采用空分复用的压电自感知执行器进行振动主动控制奠定了基础。

Study on the Actuation and Sensing Propertise of Space-Sharing Piezoelectric Self-Sensing Actuator

Piezoelectric self-sensing actuator can be applied in active vibration control. Space-sharing mode is a new way to implement the self-sensing actuator by dividing the electrode of one piezoelectric ceramic wafer into sensing and actuating sections. The actuation and sensing effect of two patterns of the dividing-electrode piezoelectric wafer on the cantilever beam are studied. The frequency responses of such a system under desired operating conditions prove the feasibility of a sensor and an actuator coexisting on a single piezoelectric wafer. Experiment results also show that there is a constant offset in the output of the sensor due to the parasitic actuator-sensor coupling. A method to determine the electrostatic coupling is proposed using the property of beam at the anti-resonant frequencies. Experiments are carried out to measure the electrostatic coupling coefficients under different electrode widths and electrode gaps. The groundwork is established for implementing space-sharing piezoelectric self-sensing in vibration reduction and motion control.