| 燃焰法CVD金刚石厚膜制备工艺研究 |
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| 引用本文： | 黄树涛 姚英学. 燃焰法CVD金刚石厚膜制备工艺研究[J]. 沈阳理工大学学报, 1997, 16(1): 34-38 |
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| 作者姓名： | 黄树涛 姚英学 |
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| 作者单位： | 沈阳工业学院机械工程系，哈尔滨工业大学 |
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| 摘 要： | 用燃焰法进行了金刚石厚膜的沉积实验，制备了厚度约０．６ｍｍ的金刚石厚膜．用扫描电镜观察了金刚石厚膜的生长过程，研究了生长工艺．
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| 关 键 词： | 金刚石厚膜，燃焰法，化学气相沉积 |
Study on Synthesizing Thick Diamond Films by the Combustion Flame CVD |
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| Huang Shutao Yao Xueying Zhang Hongzhi. Study on Synthesizing Thick Diamond Films by the Combustion Flame CVD[J]. Transactions of Shenyang Ligong University, 1997, 16(1): 34-38 |
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| Authors: | Huang Shutao Yao Xueying Zhang Hongzhi |
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| Abstract: | The thick diamond film (0 6 mm) has been synthesized by the combustion flame CVD.The growing process of the thick diamond films has been examined by scanning electron microscopy and the accretion technique has also been investigated. |
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| Keywords: | thick diamond film combustion flame method chemical vapour deposition. |
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