| 几种分立式微变形镜的性能模拟与比较 |
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| 引用本文： | 饶伏波,乔大勇,苑伟政,姜澄宇.几种分立式微变形镜的性能模拟与比较[J].光学仪器,2005,27(5):60-63. |
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| 作者姓名： | 饶伏波 乔大勇 苑伟政 姜澄宇 |
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| 作者单位： | 西北工业大学,微/纳米系统实验室,陕西,西安,710072 |
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| 基金项目： | 国家自然科学基金重大专项资助项目(90407020) |
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| 摘 要： | 采用形状函数法描述变形镜校正时的曲面,从适配误差、Streh l比两方面比较了四种不同单元排列方式的微变形镜。结果表明方形与砖形排列的微变形镜设计简单,但波前校正性能较差;圆形及蜂窝形微变形镜具有较高的波前校正性能,但设计加工复杂。
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| 关 键 词： | 微机电系统(MEMS) 自适应光学 微变形镜 排列方式 |
| 文章编号： | 1005-5630(2005)05-0060-04 |
| 收稿时间： | 2005/1/13 |
| 修稿时间： | 2005年1月13日 |
Simulation and comparison of several segmented micro deformable mirrors |
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| RAO Fu-bo,QIAO DA-yong,YUAN Wei-zheng,JIANG Cheng-yu.Simulation and comparison of several segmented micro deformable mirrors[J].Optical Instruments,2005,27(5):60-63. |
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| Authors: | RAO Fu-bo QIAO DA-yong YUAN Wei-zheng JIANG Cheng-yu |
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| Abstract: | Shape functions were used to describe the surfaces of the micro deformable mirrors in working state,and then four kinds of micro deformable mirrors with different arrays were designed for the simulation of the aberrated wavefronts correction.And their performances were compared from fitting error and Strehl ratio.The results show that the square array and the brick array are easier to design,but its performance is not good.The circular array performs best,but is more difficult to design. |
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| Keywords: | micro electromechanical system(MEMS) adaptive optics micro deformable mirrors array distribution |
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