CO2激光钻孔工艺优化方法研究

介绍了一种用CO2激光钻机开铜窗及打盲孔的新工艺，通过变换CO2激光钻机光束直径大小，达到CO2激光钻机开大窗，打小孔，从而控制孔型的目的。此新工艺可减少普通Cu—Direct工艺悬铜过大问题，也可避免干膜蚀刻开铜窗流程长，成本高等问题，针对激光孔孔底开裂失效缺陷也有所改善。

Study on the optimization method of CO2 laser drilling process

This paper introduces a new process which mask opening and drill blind hole by CO2 laser drilling machine, through using switch the beam diameter of CO, laser drilling machine, and achieving large mask opening and drilling tiny blind holes by CO2 laser drilling machine, so as to control the shape of the blind hole on purpose.This new technology can reduce the problem of excessive over hang of Cu-Direct process, avoid long process and expensive cost of mask opening by the dry film etching, also improved defects of the bottom of the laser blind hole crack.