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| 多重入晶圆制造厂整合式生产控制系统建模 | |
| 引用本文： | 郭永辉,冯媛,钱省三. 多重入晶圆制造厂整合式生产控制系统建模[J]. 工业工程, 2007, 10(5): 74-77 |
| 作者姓名： | 郭永辉 冯媛 钱省三 |
| 作者单位： | 1. 郑州航空工业管理学院,工业工程系,河南,郑州,450015 2. 河北能源职业技术学院,开滦党校,河北,唐山,063009 3. 上海理工大学,管理学院,上海,200093 |
| 基金项目： | 上海市重点学科建设项目 |
| 摘 要： | 将生产计划与生产调度整合,提出整合式晶圆生产控制系统,以应对生产过程中的异常情况,提高晶圆厂的生产绩效.利用两大建模工具IDEF0和Petri Net的各自优点,对整合式生产控制系统建模. |
| 关 键 词： | 晶圆制造厂 整合式生产控制 IDEF0建模工具 Petri Net建模工具 |
| 文章编号： | 1007-7375（2007）05-0074-04 |
| 修稿时间： | 2006-06-19 |
Modeling the Integrated Production Control System in Wafer Fabrication |
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| GUO Yong-hui,FENG Yuan,QIAN Xing-san. Modeling the Integrated Production Control System in Wafer Fabrication[J]. Industrial Engineering Journal, 2007, 10(5): 74-77 | |
| Authors: | GUO Yong-hui FENG Yuan QIAN Xing-san |
| Affiliation: | 1. Department of Industry Engineering, Zhengzhou Institute of Aeronautical Industry Management,Zhengzhou 450015, China; 2. Kailuan Party Institute, Hebei Energy Institute of Vocation and Technology, Tangshan 063000, China; 3. School of Management,Shanghai University of Science and Technolog,Shanghai 200093 ,China |
| Abstract: | Through integrating production planning and scheduling, this paper presents an integrated production control system, which can deal with the variability of wafer manufacturing process, to enhance the global performance. Combining the modeling tool of IDEFO and Petri Net, the model of the integrated production control system is constructed. |
| Keywords: | wafer fabrication integrated production control IDEFO Petri Net |
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