| 抛光型SLAM系统灵敏度研究 |
| |
| 引用本文： | 严真旭,温济,王亚非,袁敬闳. 抛光型SLAM系统灵敏度研究[J]. 压电与声光, 2007, 29(3): 360-362 |
| |
| 作者姓名： | 严真旭 温济 王亚非 袁敬闳 |
| |
| 作者单位： | 1. 信息产业部,军用电子元器件行业管理发展研究中心,北京100007
2. 电子科技大学,光电信息学院,四川,成都610054 |
| |
| 摘 要： | 以片式电子材料元器件作为无损检测分析对象,以提高激光扫描声学显微镜(SLAM)系统灵敏度为目标,详细分析了入射声波在抛光型分层介质中的传播规律,建立了抛光型样品自由界面动态波纹振幅数学模型。经综合分析获得了提高系统响应的方法,为进一步改进SLAM提供了理论依据。
|
| 关 键 词： | 灵敏度 激光扫描声学显微镜 全内反射角 抛光 分层介质 |
| 文章编号： | 1004-2474（2007）03-0360-03 |
| 修稿时间： | 2007-03-12 |
The Research of the Sensitivity About the Opto-polishing Layered-media Base-on SLAM |
| |
| YAN Zhen-xu,Wen Ji,WANG Ya-fei,YUAN Jing-hong. The Research of the Sensitivity About the Opto-polishing Layered-media Base-on SLAM[J]. Piezoelectrics & Acoustooptics, 2007, 29(3): 360-362 |
| |
| Authors: | YAN Zhen-xu Wen Ji WANG Ya-fei YUAN Jing-hong |
| |
| Abstract: | With the purpose of increasing the sensitivity of SLAM,slice electron-materials and elements are selected in Non-destructive Testing.Sensitivity increased of SLAM is target.The transmission law of a planar ultrasonic wave in the Opto-polishing layered-media is rigorously analyzed and a mathematical model of the amplitude about dynamic ripples on the polished interface is found. These results can be used to upgrade design and nondestructive destructive evaluation of the scanning laser acoustic microscope(SLAM). |
| |
| Keywords: | sensitivity scanning laser acoustic microscope(SLAM) total internal reflection angle polishing layered-media |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
