Micromachining of passive planar micromixer on poly (methyl methacrylate) substrate with excimer laser ablation |
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| Authors: | Heng Qi Yuhong Liu Xuan Wang Feng Shen Yong Yu Tao Chen Tiechuan Zuo |
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| Affiliation: | (1) Institute of Laser Engineering, Beijing University of Technology, 100124 Beijing, China;(2) National Microgravity Laboratory, Institute of Mechanics, Chinese Academy of Science, 100080 Beijing, China |
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| Abstract: | Excimer laser ablation technique was introduced into this work to fabricate a passive planar micromixer on the PMMA substrate. T-junction shaped and width-changed S-shaped microchannels were both designed in this micromixer to enhance mixing effect. The mixing experiment of distilled water and Rhodamine B with injection flow rate of 500 and 1,500 μm/s validates the mixing effectivity of this micromixer, and indicates the feasibility of excimer laser ablation in the microfabrication of μ-TAS device. |
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