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Investigations of ZnO thin films deposited by a reactive pulsed laser ablation
Authors:J B Cui  Y C Soo  H Kandel  M A Thomas  T P Chen  C P Daghlian
Affiliation:(1) Department of Physics and Astronomy, University of Arkansas at Little Rock, Little Rock, AR 72204, USA;(2) E. M. Facilities, Dartmouth College, Hanover, H 03755, USA
Abstract:Highly transparent ZnO thin films were deposited at different substrate temperatures by pulsed laser deposition in an oxygen atmosphere. The thin films were characterized by various techniques including X-ray diffraction, scanning electron microscopy, optical absorption, and photoluminescence. We demonstrated that oriented wurtzite ZnO thin films could be deposited at room temperature using a high purity zinc target. Variable temperature photoluminescence revealed new characteristics in the band edge emission. The underlying mechanism for the observed phenomena was also discussed.
Keywords:thin films  pulsed laser deposition  optical property  zinc oxide
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