Frequency-dependent noise analysis and damping in MEMS |
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Authors: | Mrigank Sharma Edmond Cretu |
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Affiliation: | (1) Electrical and Computer Engineering, University of British Columbia, Vancouver, Canada |
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Abstract: | The paper presents a combined noise and damping analysis for MEMS structures, based on frequency-dependent behavioral models
extracted from finite element simulations. The design of high sensitivity MEMS-based microsystems needs to consider the frequency
noise shaping induced by damping phenomena on micro scale motion, for its contribution can be significant in the system level
noise analysis. Frequency-dependent behavioral models for squeeze-film damping are generated from finite element analysis
simulations. Unlike existing noise analysis reported in literature, based on frequency-independent damping assumption, the
paper integrates the damping and noise aspects using the same frequency-dependent models. The results can be used for a noise-based
optimization procedure applied to the design of resonating microsensors, as illustrated for the case of a MEMS-based gyroscope. |
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Keywords: | |
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